#FIG 3.1 Portrait Center Inches 1200 2 5 1 0 1 -1 -1 0 0 -1 0.000 0 1 1 0 6385.125 4005.750 6615 4185 6675 3975 6525 3750 2 1 1.00 60.00 120.00 2 1 0 1 -1 7 0 0 -1 0.000 0 0 7 1 1 2 0 0 1.00 60.00 120.00 0 0 1.00 60.00 120.00 5400 4200 7575 3330 2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 1 0 2 0 0 1.00 60.00 120.00 5400 4200 10000 4200 2 1 0 3 -1 -1 0 0 -1 0.000 0 0 7 0 0 3 8031 4157 8031 4157 7117 2440 2 1 0 3 -1 -1 0 0 -1 0.000 0 0 7 0 0 3 7233 2326 7233 2326 5387 1731 2 1 0 3 -1 -1 0 0 -1 0.000 0 0 7 0 0 3 5361 1546 5361 1546 3665 2490 2 1 0 3 -1 -1 0 0 -1 0.000 0 0 7 0 0 3 3500 2396 3500 2396 2935 4255 2 1 0 3 -1 -1 0 0 -1 0.000 0 0 7 0 0 3 3682 6032 3682 6032 2767 4315 2 1 0 3 -1 -1 0 0 -1 0.000 0 0 7 0 0 3 5483 6668 5483 6668 3638 6072 2 1 0 3 -1 -1 0 0 -1 0.000 0 0 7 0 0 3 7163 5894 7163 5894 5467 6839 2 1 0 3 -1 -1 0 0 -1 0.000 0 0 7 0 0 3 7845 4168 7845 4168 7280 6026 2 1 1 1 -1 -1 0 0 -1 10.000 0 0 7 1 1 3 0 0 1.00 75.00 135.00 0 0 1.00 75.00 135.00 7330 2359 7330 2359 8293 4043 4 0 -1 0 0 32 20 0.0000 4 210 135 6390 3645 d\001 4 0 -1 0 0 0 24 0.0000 4 255 1995 1125 1200 Silicon Barrel\001 4 0 -1 0 0 0 14 0.0000 4 195 2520 1125 1575 Centered on (O,O,Z0_global)\001 4 0 -1 0 0 32 20 0.0000 4 270 150 6825 3975 b\001 4 0 -1 0 0 0 18 0.0000 4 255 3330 1200 7200 Silicon Barrel input variables:\001 4 0 -1 0 0 0 20 0.0000 4 195 720 6225 1875 Wafer\001 4 0 -1 0 0 1 20 0.0000 4 210 645 8055 3135 width\001 4 0 -1 0 0 0 14 0.0000 4 195 7245 2100 7650 Beta is the angle in the x-y plane between the x axis and the center of the first wafer \001 4 0 -1 0 0 0 14 0.0000 4 195 6225 2100 7950 Tilt is the rotatation angle of the wafer about the center point of the wafer\001 4 0 -1 0 0 0 14 0.0000 4 195 4620 2775 8250 tilt equals zero when beta is perpendicular to the plane\001 4 0 -1 0 0 0 14 0.0000 4 195 5295 2775 8550 tilt is positive for counterclockwise rotations - see next figure.\001 4 0 -1 0 0 0 14 0.0000 4 195 5025 2100 8925 Delta is the distance from the origin to the wafer along beta\001 4 0 -1 0 0 0 14 0.0000 4 150 2955 2100 9300 Width is the full width of the wafer \001 4 0 -1 0 0 0 14 0.0000 4 195 2880 2100 9675 Z_length is full length of the wafer\001 4 0 -1 0 0 0 14 0.0000 4 195 3240 2100 10050 Wafers can overlap if they are tilted. \001 4 0 -1 0 0 0 14 0.0000 4 195 5535 2100 10425 The angle between the centers of adjacent wafers is 2 / nwafer\001 4 0 -1 0 0 32 12 0.0000 4 90 105 6600 10425 p\001