[GENERAL] BootScriptFileName = BootScriptArguments = [GROUPS] InterlockedGroups = SingleAxisInUse = SINGLE; DUAL; DIGITALSTEP; SingleAxisWithClampingInUse = ;CLAMPING SingleAxisThetaInUse = ;THETA SpindleInUse = ;SPIN XYInUse = ;XY XYZInUse = ;XYZ TZInUse = ;TZ MultipleAxesInUse = ;MULTI [XY] PositionerInUse = X,Y InitializationAndHomeSearchSequence = YThenX; Together ; XY gantry motor force XMotorForceBalance = Disabled ; Enabled or Disabled ;YOffsetForForceRatio = 0 ;PrimaryYForceRatio = 0 ;SecondaryYForceRatio = 0 ; Mapping X XMappingFileName=;XYMappingX.map ;XMappingLineNumber=3 ;XMappingColumnNumber=3 ;XMappingMaxPositionError=20 ; Mapping Y YMappingFileName=;XYMappingY.map ;YMappingLineNumber=3 ;YMappingColumnNumber=3 ;YMappingMaxPositionError=20 [XY.X] PlugNumber = 1 StageName = XML350 ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 ;--- secondary positioner SecondaryPositionerGantry = Enabled ; Enabled or Disabled SecondaryPlugNumber = 2 SecondaryStageName = XML210; RGV100_DRVM4; SecondaryPositionerGantryEndReferencingPosition = 5; SecondaryPositionerGantryEndReferencingTolerance = 100; 0.5 SecondaryPositionerGantryOffsetAfterInitialization = 0 SecondaryPositionerGantryMotorEnableDelay = 1.0 ; seconds [XY.Y] PlugNumber = 7 StageName = RGV100 ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 ;--- secondary positioner SecondaryPositionerGantry = Disabled ; Enabled or Disabled [XYZ] PositionerInUse = X,Y,Z InitializationAndHomeSearchSequence = Together ; Mapping X XMappingFileName=;XYZMappingX.map ;XMappingLineNumber=3 ;XMappingColumnNumber=3 ;XMappingMaxPositionError=20 ; Mapping Y YMappingFileName=;XYZMappingY.map ;YMappingLineNumber=3 ;YMappingColumnNumber=3 ;YMappingMaxPositionError=20 ; Mapping Z ZMappingFileName=;XYZMappingZ.map ;ZMappingLineNumber=3 ;ZMappingColumnNumber=3 ;ZMappingMaxPositionError=20 [XYZ.X] PlugNumber = 1 StageName = XML350 ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 [XYZ.Y] PlugNumber = 2 StageName = XML210 ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 [XYZ.Z] PlugNumber = 3 StageName = URS100BCC_DRV03; ILS200CCHA; RGV100 ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 [MULTI] PositionerInUse = M1,M2 PositionerNumber = 2 InitializationAndHomeSearchSequence = OneAfterAnother; Together; OneAfterAnotherInReverseOrder [MULTI.M1] PlugNumber = 5 StageName = UTM100PP1HL ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 ;--- secondary positioner SecondaryPositionerGantry = Disabled ; Enabled or Disabled ;SecondaryPlugNumber = 4 ;SecondaryStageName = UTM100PP1HL ;SecondaryPositionerGantryEndReferencingPosition = 0 ;SecondaryPositionerGantryEndReferencingTolerance = 10 ;SecondaryPositionerGantryOffsetAfterInitialization = 0 ;SecondaryPositionerGantryMotorEnableDelay = 1.0 ; seconds [MULTI.M2] PlugNumber = 6 StageName = UTM100CC1HL ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 ;--- secondary positioner SecondaryPositionerGantry = Disabled ; Enabled or Disabled [TZ] PositionerInUse = Z1, Z2, Z3 TZDecouplingGainMatrixFileName = ; TZ_decoupling_matrix_filename.txt MaximumZZZTargetDifference = 100 ; Maximum difference between Z target positions (units) InitializationAndHomeSearchSequence = Together ; Together or OneAfterAnother [TZ.Z1] PlugNumber = 1 StageName = XML350 ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 [TZ.Z2] PlugNumber = 2 StageName = XML210 ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 [TZ.Z3] PlugNumber = 3 StageName = URS100BCC_DRV03; ILS200CCHA; RGV100 ; Time flasher TimeFlasherBaseFrequency = 40e6 ;Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 [SPIN] PositionerInUse = Pos [SPIN.Pos] PlugNumber = 4 StageName = RGV100_SPINDLE ;--- Time flasher TimeFlasherBaseFrequency = 40e6 ; Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 [DUAL] PositionerInUse = Pos [DUAL.Pos] PlugNumber = 1, 2 StageName = XM_DUAL ;--- Time flasher TimeFlasherBaseFrequency = 40e6 ; Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 ;--- secondary positioner SecondaryPositionerGantry = Disabled ; Enabled or Disabled [SINGLE] PositionerInUse = Pos [SINGLE.Pos] PlugNumber = 5 StageName = UTM100PP1HL ;--- Time flasher TimeFlasherBaseFrequency = 40e6 ; Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 ;--- secondary positioner SecondaryPositionerGantry = Disabled ; Enabled or Disabled ;SecondaryPlugNumber = 6 ;SecondaryStageName = UTM100CC1HL; ;SecondaryPositionerGantryEndReferencingPosition = 5; ;SecondaryPositionerGantryEndReferencingTolerance = 100; 0.5 ;SecondaryPositionerGantryOffsetAfterInitialization = 0 ;SecondaryPositionerGantryMotorEnableDelay = 1.0 ; seconds [DIGITALSTEP] PositionerInUse = Pos [DIGITALSTEP.Pos] PlugNumber = 8 StageName = DIGITAL_STEP_STAGE ;--- Time flasher TimeFlasherBaseFrequency = 40e6 ; Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 ;--- secondary positioner SecondaryPositionerGantry = Disabled ; Enabled or Disabled [CLAMPING] PositionerInUse = Pos ;--- Clamping ClampInputBit = NoFeedback ; GPIOx.DIy (x=1,y=1..8 or x=2,y=1..6 or x=3,y=1..6 or x=4,y=1..16) or NoFeedback (sensor simulation) ;ClampInputMode = ; NonInverted (clamped if input=1, unclamped if input=0) or Inverted (clamped if input=0, unclamped if input=1), parameter not needed if ClampInputBit=NoFeedback ClampOutputBit = GPIO4.DO2 ; GPIOx.DOy (x=1,y=1..8 or x=3,y=1..6 or x=4,y=1..16) ClampOutputMode = Inverted ; NonInverted (output 1 to clamp, output 0 to unclamp) or Inverted (output 0 to clamp, output 1 to unclamp) ClampingActivatingTime = 0.01 ; seconds ClampingReleaseTime = 0.01 ; seconds ClampingActivatingTimeout = 0.1 ; seconds ClampingReleaseTimeout = 0.1 ; seconds ClampingPositionOffset = 0 ; units [CLAMPING.Pos] PlugNumber = 6 StageName = UTM100CC1HL ;--- Time flasher TimeFlasherBaseFrequency = 40e6 ; Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 ;--- secondary positioner SecondaryPositionerGantry = Disabled ; Enabled or Disabled ;SecondaryPlugNumber = 5 ;SecondaryStageName = UTM100PP1HL ;SecondaryPositionerGantryEndReferencingPosition = 5; ;SecondaryPositionerGantryEndReferencingTolerance = 100; 0.5 ;SecondaryPositionerGantryOffsetAfterInitialization = 0 ;SecondaryPositionerGantryMotorEnableDelay = 1.0 ; seconds [THETA] ; THETA SingleAxisTheta group PositionerInUse = Pos ; Theta correction on XY ThetaCorrectionXYGroupName = ThetaCorrectionLowPassCutOffFrequency = 20 ; Hz ; Yaw mapping YawMappingXYGroupName = YawMappingToThetaFileName = YawMappingToThetaLineNumber = YawMappingToThetaColumnNumber = YawMappingToThetaMaxPositionError = YawMappingToXFileName = YawMappingToXLineNumber = YawMappingToXColumnNumber = YawMappingToXMaxPositionError = YawMappingToYFileName = YawMappingToYMaxPositionError = YawMappingToYLineNumber = YawMappingToYColumnNumber = ; Clamping ClampRestType = Unclamped ; Clamped or Unclamped ClampActivatingTime = 0.03 ; seconds ClampActivatingTimeOut = 0.5 ; seconds ClampReleaseTime = 0.12 ; seconds ClampReleaseTimeOut = 0.5 ; seconds [THETA.Pos] PlugNumber = 3,4,5 ; Theta with 3 encoders StageName = THETA_STAGE ;--- Time flasher TimeFlasherBaseFrequency = 40e6 ; Hz ;PIDBase (X) PIDBaseFilter = Disabled ; Enabled or Disabled ;MovingMass = 107 ;StaticMass = 1120 ;Viscosity = 17000 ;Stiffness = 1105000 ; CIE08CompensatedPCO mode CIE08CompensatedPCOMode = Disabled ; Enabled or Disabled ;CIE08CompensatedPCOMaximumDataNumber = 1000000 ; Value <= 1000000 ;--- secondary positioner SecondaryPositionerGantry = Disabled ; Enabled or Disabled ;SecondaryPlugNumber = 6,7,8 ;SecondaryStageName = THETA_STAGE ;SecondaryPositionerGantryEndReferencingPosition = 5; ;SecondaryPositionerGantryEndReferencingTolerance = 100; 0.5 ;SecondaryPositionerGantryOffsetAfterInitialization = 0 ;SecondaryPositionerGantryMotorEnableDelay = 1.0 ; seconds