#FIG 3.2 Portrait Center Inches Letter 100.00 Single -2 1200 2 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 7200 3600 9600 3600 9600 7200 7200 7200 7200 3600 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 4200 3600 6600 3600 6600 7200 4200 7200 4200 3600 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 4200 5100 6600 5100 6600 5700 4200 5700 4200 5100 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 1 7800 5100 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 7800 5100 9000 5100 9000 5700 7800 5700 7800 5100 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1200 3600 3600 3600 3600 7200 1200 7200 1200 3600 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 2100 3600 2700 3600 2700 7200 2100 7200 2100 3600 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1200 3600 1500 3600 1500 3900 1200 3900 1200 3600 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1500 3600 1800 3600 1800 3900 1500 3900 1500 3600 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1800 3600 2100 3600 2100 3900 1800 3900 1800 3600 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1200 3900 1500 3900 1500 4200 1200 4200 1200 3900 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1500 3900 1800 3900 1800 4200 1500 4200 1500 3900 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1200 4200 1500 4200 1500 4500 1200 4500 1200 4200 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1800 3900 2100 3900 2100 4200 1800 4200 1800 3900 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1500 4200 1800 4200 1800 4500 1500 4500 1500 4200 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 1800 4200 2100 4200 2100 4500 1800 4500 1800 4200 2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5 4200 3600 5100 3600 5100 3900 4200 3900 4200 3600 2 2 1 1 -1 7 0 0 -1 4.000 0 0 -1 0 0 5 4800 3600 5700 3600 5700 3900 4800 3900 4800 3600 2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 1 0 2 1 0 1.00 60.00 120.00 1575 3075 1650 3825 2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 1 0 2 1 0 1.00 60.00 120.00 1725 3075 1950 3825 2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 1 0 2 1 0 1.00 60.00 120.00 4950 3075 4950 3825 2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 1 0 2 1 0 1.00 60.00 120.00 1425 3075 1350 3825 4 0 -1 0 0 0 12 0.0000 4 135 615 2100 7800 X-GAP\001 4 0 -1 0 0 0 12 0.0000 4 135 615 5100 7800 Y-GAP\001 4 0 -1 0 0 0 12 0.0000 4 135 1305 7800 7725 WINDOW-GAP\001 4 0 -1 0 0 0 12 0.0000 4 180 915 1275 3000 Rectangular\001 4 0 -1 0 0 0 12 0.0000 4 135 1215 2175 3000 Silicon Wafers\001 4 0 -1 0 0 0 12 0.0000 4 180 1530 4275 3000 Overlapping Wafers\001