#FIG 3.1
Portrait
Center
Inches
1200 2
2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5
	 2400 2400 2700 2400 2700 3600 2400 3600 2400 2400
2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5
	 2700 3600 3000 3600 3000 4800 2700 4800 2700 3600
2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5
	 2400 4800 2700 4800 2700 6000 2400 6000 2400 4800
2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5
	 2700 6000 3000 6000 3000 7200 2700 7200 2700 6000
2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5
	 4800 2400 5100 2400 5100 3900 4800 3900 4800 2400
2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5
	 5100 3600 5400 3600 5400 5100 5100 5100 5100 3600
2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5
	 4800 4800 5100 4800 5100 6300 4800 6300 4800 4800
2 2 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5
	 5100 6000 5400 6000 5400 7500 5100 7500 5100 6000
2 3 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 2325 7950 2700 7950 2325 7950
2 3 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 2850 7950 4050 7950 2850 7950
2 3 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 4
	 2625 7875 2700 7950 2625 8025 2625 7875
2 3 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 5
	 2925 7875 2850 7950 2850 7950 2925 8025 2925 7875
2 3 1 1 -1 7 0 0 -1 4.000 0 0 -1 0 0 3
	 2850 6000 2850 8100 2850 6000
2 3 1 1 -1 7 0 0 -1 4.000 0 0 -1 0 0 3
	 2700 7125 2700 8100 2700 7125
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 1 0 2
	1 0 1.00 60.00 120.00
	 1950 7650 2700 7500
4 0 -1 0 0 0 12 0.0000 4 135 1515 900 1800 Tiled Silicon Wafers\001
4 0 -1 0 0 0 12 0.0000 4 180 2475 5400 1800 Tiled Overlapping Silicon Wafers\001
4 0 -1 0 0 0 12 0.0000 4 180 1515 600 7500 Nominal Z-position\001
4 0 -1 0 0 0 12 0.0000 4 180 615 825 7800 of Layer\001
4 0 -1 0 0 0 12 0.0000 4 135 555 3225 7875 zOffset\001